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All 기본Nikon stepper
AMAT Part No : 0200-00468 , BUSHING,CERAMIC,REV 5.0 VECTRA IMP
AMAT Part NO : 0021-07480 , BAR RF CONN,FT5, REV5.0 VECTRA IMP,300MM
AMAT Part No : 0021-07745 , SCRCAP SKT HD 8-32X5/8"L TORX SKT NITRON
AMAT Part No : 0021-07747 , SCREEW CAPTIVE RF FT 1/4"-20 TORX NITRON
AMAT Part No : 0021-07746 , SCREW 8-32 X 1" L SKT HD CAP,TORX,NITRONIC 60
BG4-3503 , AF DRV PCB ASS'Y
AMAT Part No : 0021-22583 , BUSHING RIGID SUPPORT VECTRA IMP ICE
AMAT Part No : 0021-07479 , BAR,RF CONNECTOR FT1, REV5.0 VECTRA IMP
AMAT Part No : 0200-20440 , REST BUTTON, SHORT 300MM VECTRA IMP
AMAT Part No : 0021-04258 , PLATE, RETAINER ALUMINUM
AMAT Part No : 0021-07483 , CUP OUTER, DUAL FEEDTHRU,REV5.0 VECTRA IMP
AMAT Part NO : 0021-07482 , CUP OUTER, RIGID SUPPORT,REV5.0 VECTRA IMP
RFPP RF Generator , ATL-100RA
DAIHEN , Microwave , SGP-15B
RFPP , RF Generator , LF-5B
SEIKOSEIKI , TMP Controller , STP-A2203PV ( 3620-00093 )
RFPP , RF Match , TL-10RU
AMAT Part No : 0010-00563 , 2V Power Supply (LAMBDA)
AMAT Part No : 0010-00138 , DC 24V Power Supply
AMAT Part No : DC 24V Power Supply
AMAT Part No : 0100-70008 , Heat Exchanger AC Box
AMAT Part No : 0010-01442 , Microwave Endpoint Detector
Thermo Electron Newington , Power : 208V 60Hz 3PH /200V 50HZ 3/PE, RATED CURRENT : 24A , Weight : 15.3 LBS(6.9Kg)
AMAT Part No : 0020-20223 , PLATE, GAS DISTRIBUT , 2-12150000-18 REV:G-
AMAT Part No : 0020-32036 , PLATE BLOCKER 100 SX, UNIVERSAL CHAMBER
AMAT Part No : 0020-32318 , GAS DISTR PLATE, 37 HOLES, OXALIC, 5-7 MIL, EGEC
AMAT Part No : 0200-36105 , CHAMBER INSERT 200MM TXZ CIP
AMAT Part No : 3870-01000 , VALVE ASSY THROTTLE MxP + 200MM, GEAR TYP
AMAT Part No : 0970-01002 , ISOL WATER COOLER RPS
AMAT Part No : 0010-10980 , ASSY, TOP LID, RPS
AMAT Part No : 0190-70060 , wMAGNET DRIVE ASSY ( Sierracin Magnedyne 1100-0051-00 Magnet Driver )
AMAT Part No : 0015-09091 , PHASE ANGLE CON
AMAT Part No : 0190-76048 , PWR SUP, RF 1250W 13.56MHZ 200/208VAC
AMAT Part No : 0190-09246 , wMICROWAVE TUNER,3-STUB,MANUAL,ASP
AMAT Part No : 0190-09227 , PLASMA APPLICATOR, PRSP
AMAT Part No : 0190-09275 , WAVEGUIDE, E-BEND,LOWER ASP
AMAT Part No : 0040-45164 / 0040-45206 , ESC ASSY 200MM FLAT
AMAT Part No : 0040-45164 / 0040-45205 , ESC ASSY 200MM FLAT
AMAT Part No : 0040-00876 / 0040-05592 , E-Max 200mm ESC Chuck EMXP+ Dual Zone
AMAT Part No : 0200-00261 , CHAMBER INSERT 200MM TXZ CIP
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